“…Inside the reactor, the substrates were heated in-situ in ultra pure H 2 at 1100°C to remove the native surface oxides. From a previous study, [58] an open-circuit voltage (V oc ) degradation of the solar cell was observed when the back Ge epilayer was grown after epitaxial growth of the n-Si emitter. To rectify this issue, the growth sequence of Si and Ge epilayers was reversed.…”