Enhanced Sensing Performance of Integrated Gas Sensor Devices

Abstract

Semiconducting metal oxide (SMO) gas sensors, dedicated to wearable devices were designed, fabricated, and characterized in terms of power consumption, thermal distribution, and sensing capability. The sensors demonstrate a sensitivity down to ppb-level VOC concentrations at a low power consumption of 10.5 mW. To further enhance the baseline stability and sensing response characteristics at low power consumption, a new sensor structure is proposed. The design implements novel aspects in terms of fabrication and microheater geometry, leading to improved sensor performance which enables new applications for SMO gas sensors. In this work, two designs were analyzed using experimental characterization and simulation. The results of the analyses of the two sensors are comparatively reported.

Plasmonic Refractive Index and Temperature Sensor Based on Graphene and LiNbO3

“…LSPPs have been an integral part of most of the new sensor designs by investing metal layers in the form of gold (Au) or silver (Ag) inside the sensors in a variety of geometrical shapes and structures, thereby proving to be game-changers [ 13 , 14 ]. The high dependency of surface plasmon resonance (SPR) on the sensor perimeter, geometry, and refractive index (RI) of the surrounding medium makes them ideal for sensing applications [ 15 ]. Thus far, a countless number of sensors with unique designs have become part of the sensing world.…”