Enhancing Pressure Sensitivity of Langasite Membrane-Based High-Temperature Pressure Sensor Using Shear Horizontal SAW

Shan, Qingchuan; Shi, Ruchuan; Li, Zilin; Li, Wenxuan; Hao, Wenchang; Luo, Wei; Han, Tao

doi:10.1109/jsen.2024.3371587

IEEE Sensors J.

2024

DOI: 10.1109/jsen.2024.3371587

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Enhancing Pressure Sensitivity of Langasite Membrane-Based High-Temperature Pressure Sensor Using Shear Horizontal SAW

Qingchuan Shan,

Ruchuan Shi,

Zilin Li

et al.

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Enhancing Pressure Sensitivity of Langasite Membrane-Based High-Temperature Pressure Sensor Using Shear Horizontal SAW

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