2020
DOI: 10.1007/s10853-020-05274-2
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Enhancing the surface properties and functionalization of polymethyl methacrylate with atomic layer-deposited titanium(IV) oxide

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Cited by 23 publications
(21 citation statements)
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“…Figure 1 compares the experimental and calculated moles of adsorbed titanium in each ALD cycle. The experimental moles are found from the thickness of TiO 2 film deposited in the previously reported study [10]. In the given ALD condition [3], the water molecules act as co-reactant of the reaction throughout the initial cycles.…”
Section: Resultsmentioning
confidence: 99%
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“…Figure 1 compares the experimental and calculated moles of adsorbed titanium in each ALD cycle. The experimental moles are found from the thickness of TiO 2 film deposited in the previously reported study [10]. In the given ALD condition [3], the water molecules act as co-reactant of the reaction throughout the initial cycles.…”
Section: Resultsmentioning
confidence: 99%
“…Beyond a specific number of cycles, the growth rate on both silicon reference and stand-alone silicon were the same. It was conjectured that after the formation of a relatively thick film on the PMMA surface, the water molecules were either depleted or trapped under the film, and their effect was diminished [10]. To support this assumption, we decided to calculate the precise amount of water molecules and theoretically support the hypothesis of water existence inside the ALD reactor.…”
Section: Introductionmentioning
confidence: 99%
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“…The coated PMMA reduced the water contact angle from 84° to almost 20°, which means a remarkable hydrophilicity improvement. The hardness of the sample with 30 nm TiO 2 was tested by Vickers’ hardness method, applying a 300 g-force; the results were improved by almost 60% [ 55 ].…”
Section: Coatings On Pmma By Thermal Atomic Layer Depositionmentioning
confidence: 99%