Ensuring Measurement Unity in the Field of Dimensional Nanometrology

Abstract

The major problem related to ensuring measurement unity in the field of dimensional nanometrology can be addressed to lack of norms that defines characteristics of measurement standards for that field of metrology. In Laboratory for precise measurements of length (LFSB) significant efforts have been made in order to investigate metrological characteristics of standards in the field of microand nanometrology. In this paper we present results of intensive work and research carried out in LFSB in order to develop standard in the field of dimensional nanometrology that will significantly contribute to the insurance of measurement unity in that field of metrology.