Epitaxial Growth

Abstract

The sections in this article are Introduction The Epitaxial Process: General Features Surface Thermodynamics and Surface Structure Surface Transport and Incorporation Growth Behaviors Chemical Vapor Deposition: Technology and Issues Reactors: Mass, Fluid, and Thermal Transport Fluid Behavior and Reactor Design Mass and Thermal Transport Gas Phase and Surface Chemistry Liquid Phase Epitaxy ( LPE ) Technology LPE Growth Procedures Molecular Beam Epitaxy ( MBE ) Technology Specific Epitaxial Systems: Materials and Growth Issues Silicon Chemical Vapor Deposition Silicon Chemical Vapor Deposition: Surface and Reactor Considerations Silicon Chemical Vapor Deposition: Growth Chemistry Heterojunction Formation Impurity Incorporation Ga As MBE Growth of Al Ga As by LPE In P Metal Organic Vapor Phase Epitaxy ( MOVPE ) Acknowledgements