Epitaxial Pt Films with Different Orientations Grown on (100)Si Substrates by RF Magnetron Sputtering

Abstract

Epitaxial Pt films with (111) and (100) orientations were grown on Y 2 O 3 -stabilized ZrO 2 (YSZ)-covered (100)Si substrates by RF sputtering. (111)Pt films were epitaxially grown on (100)YSZ==(100)Si substrates at 580 and 680 C, but competitive crystal orientations of (111) and (100) at 780 C. In contrast, a (100)-oriented epitaxial Pt film was grown at 550 C on a (100)YSZ==(100)Si substrate with a (100)-oriented epitaxial (100)Ir buffer layer. This orientational control of epitaxial Pt films enables the epitaxial growth of perovskite layers with different orientations on thermally and chemically stable Pt bottom electrodes grown on (100)Si substrates.

Enhancement of spontaneous polarization in lead zirconate titanate thin films by Dy3+ substitution

“…12 These orientations due to the epitaxial growth of ͑111͒PZT on each ͑111͒SrRuO 3 have been already discussed in previous work. 10,12 These results confirm the epitaxial growth of PZT films on the substrates by CSD as well as by MOCVD. 9,12,13 Obvious grain structure was not detected for both films and no obvious change in microstructure was detected by the AFM observations.…”

“…10 Trihydrated lead acetate ͑Pb͑CH 3 COO͒ 2 ·3H 2 O͒, titanium normal-butoxide ͑Ti͑O·n-C 4 H 5 ͒ 4 ͒, zirconium iso-propoxide ͑Zr͑O·i-C 3 H 7 ͒ 4 ͒, dysprosium nitrate Dy͑NO 3 ͒ 3 and 2-methoxyethanol were the starting materials for the preparation of CSD precursor solutions. The nominal compositions of the precursor solutions were controlled to be Pb 1.00 ͑Zr 0.40 Ti 0.60 ͒O 3 ͓PZT͔ and Pb 1.00 Dy 0.02 ͑Zr 0.40 Ti 0.60 ͒ 0.99 O 3 ͓Dy-PZT͔ with 5% Pb excess.…”

Epitaxial films of metals from the platinum group (Ir, Rh, Pt and Ru) on YSZ-buffered Si(111)

“…They allow to distinguish between purely fibre textured layers, layers with several orientational variants and films with only one epitaxial texture component. As observed in former studies by other groups, (111)-oriented metal films are frequently composed of two or more texture components (twins) which are rotated azimuthally against each other [26,[30][31][32].…”

“…(111)-oriented metal films are still predominantly grown on oxide single crystals [21][22][23][24][25]. Attempts of Okamoto et al [26] and Tokita et al [27] to use YSZ/Si(0 0 1) as substrate for the growth of Pt(111) yielded films with four equivalent texture variants.…”

In-plane orientation and composition dependences of crystal structure and electrical properties of {100}-oriented Pb(Zr,Ti)O3films grown on (100) Si substrates by metal organic chemical vapor deposition

“…The growth conditions and thickness of each layer were already reported. [24][25][26] Here, the pseudocubic symmetric index designated as (hkl) c was used for SrRuO 3 and LaNiO 3 .…”