1999
DOI: 10.1021/ac9908290
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Equivalent-Circuit Model for the Thickness-Shear Mode Resonator with a Viscoelastic Film Near Film Resonance

Abstract: We derive a lurnped-elemen~equivalent-circuit model for the thickness shear mode (TSM) resonator with a viscoelastic film. This modified ButterWorth-Van Dyke model includes in the motional branch a series LCR resonator, representing the quartz resonance, and a parallel LCR resonator, representing the film resonance. This model is valid in the vicinity of film resonance, which occurs when the acoustic phase shift across the film is an odd multiple of 7d2radians. This model predicts accurately the frequency chan… Show more

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Cited by 98 publications
(99 citation statements)
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“…Values of G′ and G″ were calculated using the Maple package by fitting experimental impedance (Z) data using [21,22,34,35]:…”
Section: Data Fittingmentioning
confidence: 99%
See 1 more Smart Citation
“…Values of G′ and G″ were calculated using the Maple package by fitting experimental impedance (Z) data using [21,22,34,35]:…”
Section: Data Fittingmentioning
confidence: 99%
“…The experimental approach is to use a high frequency acoustic wave device (a thickness shear mode, TSM, resonator [20]) to determine the surface mechanical impedance, from which one can extract the film mechanical behaviour [21]. We parameterize this in terms of the shear modulus (G), expressed as the complex quantity G′ + jG″, where G′ is the storage modulus, G″ is the loss modulus and j indicates the phase relationship.…”
Section: Introductionmentioning
confidence: 99%
“…The concept of liquid entrainment enables the Kanazawa and Gordon frequency shift to be written in terms of a frequency dependent interfacial mass loading layer of thickness 8, i.e. Af n lf n =-fpi8l{jd s p s ) Modelling of the TSM response to mass loading layers has developed well beyond the simple Sauerbrey and the Kanazawa and Gordon equations and the frequency and damping response of a quartz crystal to single or multiple viscoelastic layers, which contain the rigid mass and Newtonian liquid limits, can now be calculated [7][8][9][10]. However, these original equations still provide an important conceptual reference for how solid and liquid properties, and changes in operating frequency, influence acoustic wave response.…”
Section: Introductionmentioning
confidence: 99%
“…Indeed, it is similar in origin to the idea of a shear wave resonance known in work with QCMs. 24,25 A close comparison of Eq. ͑36͒ in the thin layer mass loading limit with acoustic impedance models for QCMs shows that the tan x term in Eq.…”
Section: B Numerical Results For Phase Speed and Insertion Lossmentioning
confidence: 70%