Error correction analysis of wavefront testing in quadriwave lateral shearing interferometry

Abstract

Quadriwave lateral shearing interferometry (QWLSI) is based on double birefringent crystals of a beam displacer (DBCs-BD), which can generate the lateral shearing interference wavefront of four beams of overlapped replicas in the DBCs-BD orthogonal directions. When the replica waves are overlapped incident to the analyzer and the direction of the transmission axis is set as 45° or 135°, the QWLSI’s polarization interferogram can be obtained. This paper deduces the principle of QWLSI based on the DBCs-BD and presents the analysis of orthogonal error influence based on the DBCs-BD and the phase retrieval error of QWLSI when shear displacement by tilted incident on the DBCs-BD. In our investigation, we have established the correction range of the PBD’s orthogonal angle error is within −0.5∘−0.5∘, the maximum error in PV is 0.0012λ, and the maximum error in RMS is 1.3789×10−4λ in wavefront reconstruction. Moreover, when the testing light tilts to incident on the PBD in the range of −0.4∘−0.4∘, correction of the shear distance is used for wavefront reconstruction to achieve a high-precision wavefront testing result. Finally, the experiment shows that QWLSI based on the DBCs-BD exhibits feasibility and high precision.