Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting

Fei, 高飞 Gao; Jin-hui, 李晋惠 Li; Ailing, 田爱玲 Tian; Bingcai, 刘丙才 Liu; Shi-jie, 李世杰 Li; Xin, 岳鑫 Yue

doi:10.3788/gzxb20174609.0912008

光子学报

2017

DOI: 10.3788/gzxb20174609.0912008

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Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting

高飞 Gao Fei¹,

李晋惠 Li Jin-hui²,

田爱玲 Tian Ailing³

et al.

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Generalized shift–rotation absolute measurement method for optical surface shapes with polygonal apertures based on migration recognition by Radon transform

Yang

Dou

et al. 2020

Appl. Opt.

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A generalized shift–rotation absolute measurement method for optical surface shapes with polygonal apertures based on migration recognition by Radon transform is proposed. The rotation angles and translation distances of the test surface, measured three times, are calculated through migration recognition. The absolute shape of the test surface with the polygonal aperture is fitted by orthogonal Zernike polynomials. Compared to the existing absolute measurement method for polygonal apertures, our method ensures test surface measurement accuracy without high-precision attitude control and repeated adjustments. The measurement is simple and coherent, which reduces the measurement time and improves the efficiency.

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Generalized shift–rotation absolute measurement method for optical surface shapes with polygonal apertures based on migration recognition by Radon transform

Yang

Dou

et al. 2020

Appl. Opt.

View full text Add to dashboard Cite

show abstract

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Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting

Cited by 1 publication

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Generalized shift–rotation absolute measurement method for optical surface shapes with polygonal apertures based on migration recognition by Radon transform

Generalized shift–rotation absolute measurement method for optical surface shapes with polygonal apertures based on migration recognition by Radon transform

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