The present study explores a three-dimensional deformation monitoring method for the better delineation of the surface subsidence range in coal mining by combining the mining subsidence law with the geometries of SAR imaging. The mining surface subsidence of the filling working face in Shandong, China, from March 2018 to June 2021, was obtained with 97 elements of Sentinel-1A data, the small baseline subset (SBAS) technique, and the proposed method, respectively. By comparison with the ground leveling of 46 observation stations, it is shown that the average standard deviation of the SBAS monitoring results is 10.3 mm; with this deviation, it is difficult to satisfy the requirements for the delimitation of the mining impact area. Meanwhile, the average standard deviation of the vertical deformation obtained by the proposed method is 6.2 mm. Compared to the SBAS monitoring accuracy, the monitoring accuracy of the proposed method is increased by 39.8%; thus, it meets the requirements for the precise delineation of the surface subsidence range for backfill mining.