Evaluation of cleaning methods for multilayer diffraction gratings

Ashe, B.; Marshall, K. L.; Giacofei, C.; Rigatti, A. L.; Kessler, T. J.; Schmid, A. W.; Oliver, J. B.; Keck, Jason; Kozlov, A. A.

doi:10.1117/12.694884

Cited by 14 publications

(14 citation statements)

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“…Ashe [5] had described that the Piranha solution which is a mixture of a strong acid and a strong oxidizing agent was used to remove the residues on the surface of gratings at high temperature. [6] 5th International Symposium on Advanced Optical Manufacturing and The result shows that the high LIDT was greater than 2.7 J/cm 2 at 1053nm with 10-ps pulse length (for both 1-on-1 and N-on-1). The similar cleaning method which can also reaches the LIDT specification had been reported by Britten .…”

Section: Introductionmentioning

confidence: 93%

Wet-cleaning of contaminants on the surface of multilayer dielectric pulse compressor gratings by the Piranha solution

Chen

Sheng

et al. 2010

SPIE Proceedings

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Contaminants are deemed to be the initial source of optical-damage mechanisms as well as the main reason to decrease the Laser Induced Damage Threshold (LIDT) of multilayer dielectric pulse compressor gratings (PCG). In this paper, the Piranha solution was used effectively and nondestructively to remove the residual contaminants on the surface of PCG. The surface cleanliness was evaluated by Scanning Electron Microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS).The higher removal efficiency was achieved with more times of multiple-cleaning by fresh Piranha solution which has an effectiveness for a given period of time.

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Section: Introductionmentioning

confidence: 93%

Wet-cleaning of contaminants on the surface of multilayer dielectric pulse compressor gratings by the Piranha solution

Chen

Sheng

et al. 2010

SPIE Proceedings

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“…Ashe et al [11,12] were among the first to publish on this topic. They compared a number of chemical wet-cleaning methods commonly used in the semiconductor industry.…”

Section: Mld Grating Cleaningmentioning

confidence: 99%

“…Britten and Nguyen [15] developed a cleaning method for diffraction gratings that involved stripping bulk photoresist with an aqueous base and employing an oxidizing acid solution to remove residues, with oxygen plasma used as an intermediate step to remove fluorinated hydrocarbon residues. Plasma cleaning with oxygen and other gases has been suggested as a method for removing bulk organic layers of BARC [11,16] and photoresist [17,18] from gratings.…”

Section: Mld Grating Cleaningmentioning

confidence: 99%

“…Thresholds exceeding 2.7 J∕cm 2 have been reported for 10 ps testing [11,12,19,20,23,24], but in some of these studies the incidence angle was higher than 61°(necessitating a correction for comparison [25]), and in other cases damage-testing data were reported for only an air (or unspecified) environment. OMEGA EP gratings are operated in high vacuum.…”

Section: Mld Grating Cleaningmentioning

confidence: 99%

“…Surface contamination can dramatically reduce a grating's resistance to laser-induced damage [5,[8][9][10][11][12][13][14][15]. OMEGA EP pulse compressor gratings are fabricated by etching a periodic groove structure (1740 lines∕mm) into the top layer of a hafnia/silica multilayer mirror using interference lithography.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Improving the performance of high-laser-damage-threshold, multilayer dielectric pulse-compression gratings through low-temperature chemical cleaning

et al. 2013

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A low-temperature chemical cleaning approach has been developed to improve the performance of multilayer dielectric pulse-compressor gratings for use in the OMEGA EP laser system. X-ray photoelectron spectroscopy results guided the selection of targeted cleaning steps to strip specific families of manufacturing residues without damaging the grating's fragile 3D profile. Grating coupons that were cleaned using the optimized method consistently met OMEGA EP requirements on diffraction efficiency and 1054 nm laser-damage resistance at 10 ps. The disappearance of laser-conditioning effects for the highest-damage-threshold samples suggests a transition from a contamination-driven laser-damage mechanism to defect-driven damage for well-cleaned components.

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Influence of arched groove bottom on laser-induced damage of multilayer dielectric gratings

Kong

Jin

Liu

et al. 2013

Optik

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Evaluation of cleaning methods for multilayer diffraction gratings

Cited by 14 publications

References 0 publications

Wet-cleaning of contaminants on the surface of multilayer dielectric pulse compressor gratings by the Piranha solution

Wet-cleaning of contaminants on the surface of multilayer dielectric pulse compressor gratings by the Piranha solution

Improving the performance of high-laser-damage-threshold, multilayer dielectric pulse-compression gratings through low-temperature chemical cleaning

Influence of arched groove bottom on laser-induced damage of multilayer dielectric gratings

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