Evaluation of phosphorous pile-up at the Si/SiO/sub 2/ interface

Seike, A.; Sano, I.; Yamada, Kazuhiro; Ohdomari, Iwao

doi:10.1109/icsict.2006.306672

2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings 2006

DOI: 10.1109/icsict.2006.306672

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Evaluation of phosphorous pile-up at the Si/SiO/sub 2/ interface

A. Seike

I. Sano

Kazuhiro Yamada

et al.

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Evaluation of phosphorous pile-up at the Si/SiO/sub 2/ interface

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References 8 publications

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