Evolution of crystal quality and stress in the early stages of GaN-on-Si (111) MOVPE with a single AlN buffer layer

Liu, Cai; Sodabanlu, Hassanet; Sugiyama, Masakazu; Nakano, Yoshiaki

doi:10.1016/j.vacuum.2024.113945

Vacuum

2025

DOI: 10.1016/j.vacuum.2024.113945

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Evolution of crystal quality and stress in the early stages of GaN-on-Si (111) MOVPE with a single AlN buffer layer

Cai Liu,

Hassanet Sodabanlu,

Masakazu Sugiyama

et al.

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Evolution of crystal quality and stress in the early stages of GaN-on-Si (111) MOVPE with a single AlN buffer layer

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References 44 publications

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