Evolution of Getter Technology in Electronic Hermetic Packaging

Abstract

Hermetic packaging is a well-established technology used for sealing electronic and optoelectronic devices. A reliable and enabling way to preserve the proper stable atmosphere conditions in hermetic packages is the integration of engineered getter solutions, specifically designed for the characteristics of different packaged systems. Getter solutions may vary from sintered, compressed or sputtered metallic alloys for vacuum sealed packages to dispensable hybrid organic-inorganic materials for gas back filled devices. The paper will present the main features of getter materials suitable for different type of packages and will show their efficiency in absorbing detrimental gases in the devices.