Excimer ArF laser with an output energy of 1.3 J at 2.0% efficiency on the He:Ar:F2 mixture

Ражев, А. М.; Zhupikov, Andrey A.

doi:10.1007/s00340-005-1960-9

Cited by 5 publications

(5 citation statements)

References 10 publications

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“…The estimation was similar to that in [4][5][6][7] when the change of the active medium volume was taken into account. With increasing the charging voltage from 20 to 32 kV, the active volume increased from 60 to 120 cm 3 , the base level duration of the first half-period of the discharge current τ was 40 ns and the pump intensity W (RU-65) increased from 4.8 to 5.8 MW/cm 3 (Figure 2).…”

Section: Resultsmentioning

confidence: 99%

“…Additionally the system contains the automatic UV sparks preionization and low inductive discharge circuit including the peaking capacitor C 3 and the discharge gap. In accordance with [5][6][7][8][9] to obtain high value of the pump intensity in the excitation system used the inductance L=L 2 +L 5 of the main circuit was increased up to 100 nH by the increasing the inductance L 5 . The effect of this inductance on the pump intensity level was detail described in [5][6][7].…”

Section: Methodsmentioning

confidence: 98%

“…In accordance with [5][6][7][8][9] to obtain high value of the pump intensity in the excitation system used the inductance L=L 2 +L 5 of the main circuit was increased up to 100 nH by the increasing the inductance L 5 . The effect of this inductance on the pump intensity level was detail described in [5][6][7]. Here one can only to stress that the increasing the inductance L of a LC-inverter circuit lead to significant increase of the energy loaded into active volume owing to increase the part of energy transferred from storage to peaking circuit and to decrease the energy losses into the peaking circuit due to limitation of the part of current flowing back to excitation scheme during the discharge process.…”

Section: Methodsmentioning

confidence: 98%

“…Usually the pump intensity was determined as the specific power W of pumping the active medium expressed by the formula W = E/Vτ, where E is the energy stored into the peaking capacitors, V is the active volume, and τ is a base level duration of the first half-period of the discharge current [4]. For most wide spread used excimer lasers such as XeCl (308 nm), KrF (248 nm) and ArF (193 nm) with active medium based on He or Ne buffer gas the optimal pump intensity ranges were founded and described in [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

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Efficient KrCl (223 nm) excimer laser based on TPI thyratron as a high-voltage switch

Ражев

Zhupikov

2007

SPIE Proceedings

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The results of the experimental investigations of the discharge-pumped KrCl (223 nm) excimer laser with the TPI thyratron (pseudo spark gap) as a high-voltage switch are presented. The experimental investigation of the energy and temporal parameters of the pumping and radiation for KrCl laser on the Ne:Kr:HCl mixture with an excitation system of the LCinverter type based on TPI 10k/20 thyratron was carried out. The comparative analysis of the laser pumping and radiation parameters with those obtained for excitation system based on a spark gap RU-65 as a high-voltage switch was performed. As a result the output radiation energy for a laser with thyratron TPI 10k/20 was obtained to be of 40% higher than that with spark gap RU-65 at the same pumping conditions. The higher output energy and efficiency of the TPI based laser was considered to be due to higher efficiency of energy transfer from storage to discharge circuit and to active media owing to lower energy losses into TPI thyratron in comparison with the RU-65 spark gap. For KrCl excimer laser in Nе:Kr:HCl mixture the total efficiency of 1.5 % with output energy of 0.65 J was obtained for the first time.

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Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 98%

Section: Methodsmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Efficient KrCl (223 nm) excimer laser based on TPI thyratron as a high-voltage switch

Ражев

Zhupikov

2007

SPIE Proceedings

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“…In this paper the first pulsed inductive laser that worked on electronic transitions of atomic fluorine has been described. For formation of the inductive discharge the excitation system was developed on the base of the LC-inverter type scheme, which well recommended itself for the creation of high efficient UV excimer lasers [2]. In atomic fluorine (FI) inductive laser the output radiation energy of 0.12 mJ and the pulsed power of 6.0 kW at pulse duration of 20 ns (FWHM) were achieved.…”

Section: Introductionmentioning

confidence: 99%

Nitrogen, atomic fluorine and CO 2 lasers excited by a pulsed inductive discharge

2007

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The experimental investigations results of spectral, energy and temporal parameters of the first inductive N 2 , FI and CO 2 gas lasers are reported. The excitation system for formation of the achievement the pulsed cylindrical inductive discharge in gas mixtures is described. For the first time the nitrogen inductive laser (337.1 nm) with pulse power of 350 kW was created. The generation energy of 4.6 mJ with the pulse duration (FWHM) of 12±1 ns was achieved. The total efficiency of nitrogen inductive laser was 0.05 %. The laser beam has a ring form with an outer diameter of 43 mm, thickness of 1.5-2.0 mm and the divergence of 0.3 mrad. For FI inductive laser the lasing was observed on 8 lines (623-755 nm). The maximal output energy of 2.6 mJ was achieved in He:F 2 -100:1 gas mixture. The pulse duration was 80±1 ns (FWHM) that correspond to pulse power of 32 kW. The total efficiency of the FI inductive laser was 0.01 %. The ring laser beam has an outer diameter of 43 mm, thickness of 3.0 mm and the divergence of 0.4 mrad. For CO 2 (10.6 um) inductive laser the maximal output energy of 150 mJ was achieved in gas mixture He:N 2 :CO 2 -8:1:1. The pulse duration (FWHM) was 170 us that corresponds to a pulse power of 0.9 kW. The laser beam has a ring form with dimension of an outer diameter of 33 mm with the thickness about 6.0 -6.5 mm and the divergence of 4.0 mrad.

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Influence of the specific pump power on the output energy and efficiency of a 223-nm gas-discharge-pumped excimer KrCl laser

Ражев

Zhupikov

2008

Quantum Electron.

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There are a number of constraints which limit the current and voltages which can be applied on a multiple drive electrical imaging system. One obvious constraint is to limit the maximum ohmic power dissipated in the body. Current patterns optimizing distinguishability with respect to this constraint are singular functions of the difference of transconductance matrices with respect to the power norm (the optimal currents of Isaacson). If one constrains the total current (L 1 norm) the optimal patterns are pair drives. On the other hand if one constrains the maximum current on each drive electrode (an L ∞ norm), the optimal patterns have each drive channel set to the maximum source or sink current value. In this paper we consider appropriate safety constraints and discuss how to find the optimal current patterns with those constraints.

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Excimer ArF laser with an output energy of 1.3 J at 2.0% efficiency on the He:Ar:F2 mixture

Cited by 5 publications

References 10 publications

Efficient KrCl (223 nm) excimer laser based on TPI thyratron as a high-voltage switch

Efficient KrCl (223 nm) excimer laser based on TPI thyratron as a high-voltage switch

Nitrogen, atomic fluorine and CO 2 lasers excited by a pulsed inductive discharge

Influence of the specific pump power on the output energy and efficiency of a 223-nm gas-discharge-pumped excimer KrCl laser

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