Abstract:The stability and uniformity of a Radio-Frequency (RF) discharge is limited by a critical power density. Beyond this critical power density, instability occurs in the form of with physical changes in the plasma (such as contraction due to arcing). Levitsky' identified and studied the two glow modes, cx and y, of operation of an RF discharge. A detailed description of each mode can be found in the literature2.The RF discharge under consideration in the current study is the non-equilibrium Atmospheric Pressure P… Show more
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