Experimental and Numerical Study on the Second Order Harmonic (H2) and Third Order Intermodulation Distortion (IMD3) Response of Scandium Aluminum Nitride Based FBAR Devices with Different Scandium Doping Levels

Zhang, Ying; Yang, Wulin; Liu, Chen; Wang, Xinghua; Zhun, Eugene Woo Yi; Wang, Nan; Zhu, Yao

doi:10.1109/ius54386.2022.9957181

2022 IEEE International Ultrasonics Symposium (IUS) 2022

DOI: 10.1109/ius54386.2022.9957181

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Experimental and Numerical Study on the Second Order Harmonic (H2) and Third Order Intermodulation Distortion (IMD3) Response of Scandium Aluminum Nitride Based FBAR Devices with Different Scandium Doping Levels

Ying Zhang

Wulin Yang

Chen Liu

et al.

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Experimental and Numerical Study on the Second Order Harmonic (H2) and Third Order Intermodulation Distortion (IMD3) Response of Scandium Aluminum Nitride Based FBAR Devices with Different Scandium Doping Levels

Cited by 1 publication

References 9 publications

Acoustic Filters for RF Communication

Acoustic Filters for RF Communication

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