Experimental Study on Influencing Factors of Seebeck Coefficient by Using NiCr/NiSi Thin‐Film Thermocouple Prepared and Calibrated

Abstract

Accurate calibration of the Seebeck coefficient is crucial for reliable temperature measurements using thin‐film thermocouples. In this study, the calibration of NiCr/NiSi thin‐film thermocouples is investigated for precise temperature measurements. Using the magnetron sputtering method, a series of NiCr/NiSi film thermocouples are prepared and their Seebeck coefficients are obtained through standard calibration procedures. The results demonstrate good consistency and reproducibility of the thermoelectric output within the temperature range of 0–505 °C. Notably, the Seebeck coefficients remain nearly constant regardless of changes in the top and bottom order or resistance values of the NiCr and NiSi thermoelectrodes. Furthermore, it is found that the addition of an SiO2 protective film does not affect the calibration Seebeck coefficients of the NiCr/NiSi film thermocouples, with values of 7.94 and 7.96 μV °C for film thermocouples with and without SiO2, respectively. These findings provide valuable insights into the calibration of thin‐film thermocouples and can enhance the accuracy of temperature measurements. The study contributes to scientific research and engineering applications in the field of thin‐film thermocouple calibration.