Exploring the effect on the columnar structure and porosity of the synthesized Be films by oblique angle deposition in magnetron sputtering

Fu, Dengfeng; Cheng, Xinlu

doi:10.1016/j.physb.2020.412221

Physica B: Condensed Matter

2020

DOI: 10.1016/j.physb.2020.412221

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Exploring the effect on the columnar structure and porosity of the synthesized Be films by oblique angle deposition in magnetron sputtering

Dengfeng Fu

Xinlu Cheng

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Cited by 6 publications

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Exploring the effect on the columnar structure and porosity of the synthesized Be films by oblique angle deposition in magnetron sputtering

Cited by 6 publications

References 35 publications

Treelike PS-PVD coating: Hierarchical branching by shading and sintering

Treelike PS-PVD coating: Hierarchical branching by shading and sintering

A new method for characterizing the atomic composition distribution and interface structure of ultrathin multilayer films using molecular dynamics simulation assisted ARXPS

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