Extraction of the Mechanical Surface in Measurement of Nano Structures

Dietzsch, Michael; Gröger, Sophie; Gerlach, M.; Krystek, Michael

doi:10.1016/j.cirp.2007.05.128

Cited by 1 publication

(1 citation statement)

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“…The scanning process of the tactile stylus over the workpiece surface, as a common practice in roughness measurement, is a morphological dilation operation [30]. The mechanical surface could be reconstructed by carrying out on the measurement data the erosion operation with a sphere of the same radius to the stylus tip [31].…”

Section: Morphological Filtersmentioning

confidence: 99%

Correlating motif analysis and morphological filters for surface texture analysis

2013

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In contrast to the mean-line based evaluation system, motif analysis and morphological filters are two techniques oriented to the characterization of functional properties of surfaces. The motif combination procedure is consistent with the functionality of the morphological closing filter that insignificant peaks on the profile are suppressed. By linking the functionality of the structuring elements with motif combination criterions, morphological envelopes are computed efficiently. Reversely the morphological closing filter coupled with horizontal line-segment structuring elements with lengths equivalent to the motif limits for roughness and waviness provides an alternative for motif analysis. The proposed morphological method has a sound mathematical basis and is stable. An example of applying the empirical motif method (ISO 12085) and the morphological method is demonstrated. The motif parameters resulted from two methods reveal that they coincide with each other. Thus two distinct function oriented methods for surface texture evaluation are technically correlated by mutual exploitation.

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Section: Morphological Filtersmentioning

confidence: 99%