F1: Silicon 3D-integration technology and systems

Urard, Pascal; Takeuchi, Ken; Bernstein, K.; Hidaka, Hideto; Phan, Michael; Choi, Jongwan; Payne, Bob; Stojanović, Vladimir; Berkel, Kees van; Sakurai, Takayasu

doi:10.1109/isscc.2010.5433859

2010 IEEE International Solid-State Circuits Conference - (ISSCC) 2010

DOI: 10.1109/isscc.2010.5433859

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F1: Silicon 3D-integration technology and systems

Pascal Urard

Ken Takeuchi

K. Bernstein

et al.

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F1: Silicon 3D-integration technology and systems

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