Fabrication, Microstructure and Plasma Resistance Behavior of Y–Al–Si–O (YAS) Glass-Ceramics Coated on Alumina Ceramics
Eui Keun Park,
Hwan-Yoon Jang,
Seo-Yeon Jeon
et al.
Abstract:This study investigates the fabrication, microstructural characteristics and plasma resistance of Y–Al–Si–O (YAS) glass-ceramics coated on alumina ceramics. YAS frits were initially prepared using a melt-quenching method, then homogenously milled and coated onto alumina ceramics. The melt-coating process was conducted at 1650 °C for 1 h. The composition and microstructure of the glass frits and coatings were thoroughly characterized using X-ray diffraction, scanning electron microscopy, and energy-dispersive X… Show more
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