2012
DOI: 10.1557/opl.2012.1508
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Fabrication of 3D Micro Structures on Nonplanar Substrates and Its Applications for Roll Micro contact Printing

Abstract: The purpose of this research is to develop a fabrication technique of microstructures on nonplanar substrates, investigating so called, optical softlithography. In addition, PDMS roller stamps were duplicated from these structures on curved substrates as the mold, roll micro contact printing was performed successfully.Micro structuring on nonplanar substrates has not been fully established yet, although several fabrication methods, such as laser direct writing and modified photolithography, were proposed. More… Show more

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