Fabrication of Al₂O₃/SiC Composite Microcomponents using Non‐aqueous Suspension

Abstract

This paper introduces a new process for fabrication of high resolution Al2O3/SiC composite microcomponents using softlithography and non‐aqueous ceramic suspension. Polysilazane is used to provide both binding force and SiC composition. The shape retention and dimensions of the microcomponents were analyzed using a scanning electron microscope. Surface roughness, shrinkage, and density of the resultant sintered components were also discussed.

Effects of Particle Size on Soft Lithography Process, the Green and Sintered Micro Alumina Parts

“…The desired micro parts are micro gears with a thickness of 1000 μm, aspect ratio of 10 and minimum feature size <100 μm. Further information of the SU‐8 master mold and the PDMS soft mold fabrication process can be found in literatures . Afterwards, the soft molds are filled with alumina suspension.…”

“…Concentrated slurry of colloidal ceramic suspension is filled into the mold and dried in situ to form a green body in the shape of the mold cavity. The control of the soft lithography process is a key technique in fabrication of net‐shape ceramic micro parts to prevent defects and to achieve high‐quality products, as postprocess is difficult to be applied and should be avoided …”

“…Suspension processing has been studied, and the effect of pH and dispersant concentration is made clear . However, studies on the powder effect on the soft lithography process and the resultant green and sintered micro parts have not been found so far.…”

“…The control of the soft lithography process is a key technique in fabrication of net-shape ceramic micro parts to prevent defects and to achieve high-quality products, as postprocess is difficult to be applied and should be avoided. [8][9][10] Colloidal suspensions typically comprise metallic or ceramic powders, carrying medium, dispersants, binders, and other additives such as anti-foaming agents. It is well documented that the surface energy of the particles is important in controlling the processing conditions for achieving well-dispersed slurry.…”

Spark Plasma Sintering and Characterization of Graphene Platelet/Ceramic Composites

“…[1,2] However, the brittleness of the ceramics has seriously limited their further applications. [4][5][6][7][8] Among them, the addition of secondary strong and tough nanofillers has become popular for a significant improvement in the mechanical properties of the ceramic matrices can be achieved by introducing a small percentage of these nanofillers. [4][5][6][7][8] Among them, the addition of secondary strong and tough nanofillers has become popular for a significant improvement in the mechanical properties of the ceramic matrices can be achieved by introducing a small percentage of these nanofillers.…”