Fabrication of diffraction-encoded micro-particles using nano-imprint lithography

Banu, Shahanara; Birtwell, S.; Galitonov, G.; Chen, Yifang; Zheludev, Nikolay I.; Morgan, Hywel

doi:10.1088/0960-1317/17/7/s08

Cited by 15 publications

(15 citation statements)

References 27 publications

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“…Other, image-based labels include polymer particles graphically encoded by sequences of extruded dots [41,137] (Fig. 2c) or by the diffraction patterns of overlapping etched gratings [10,50].…”

Section: Signature-based Bioassaysmentioning

confidence: 99%

Magnetic biosensor technologies for medical applications: a review

Llandro

Palfreyman

Ionescu

et al. 2010

Med Biol Eng Comput

204

117

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In this review we discuss conventional methods of performing biological assays and molecular identification and highlight their advantages and limitations. An alternative approach based on magnetic nanotechnology is then presented. Firstly, magnetic carriers are introduced and their biocompatibility and functionalisation discussed, with spotlights on functionalisation via self assembled monolayers and on methods of reducing nonspecific binding. In addition an introduction is provided to the basic physical concepts behind the various types of sensors used to detect magnetic labels. Finally, progress in the field of magnetic biosensors and the outlook for the future are discussed.

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Section: Signature-based Bioassaysmentioning

confidence: 99%

Magnetic biosensor technologies for medical applications: a review

Llandro

Palfreyman

Ionescu

et al. 2010

Med Biol Eng Comput

204

117

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“…Using an Al film as a sacrificial layer underneath the SU-8 layer, hot embossing with UV-curable process was applied to fabricate nanobarcodes for genomic sequencing [132]. Sub-wavelength gratings in SU-8 by UV-curable hot embossing with a layer of post-evaporated 100-nm Al film, known as transmission polarizers with high extinction ratio were fabricated [133].…”

Section: Phase Gratings and Nanobarcodesmentioning

confidence: 99%

“…The technique was rapidly developed when UV-curable resists were exploited owing to its ease in imprint, capability of low temperature process, inertia to most chemicals and high quality in optical transmission [30,31,[135][136][137][138][139][140]. One of the early reports is about nanoimprint in UV-curable SU-8 for phase gratings [27,128,129,132] and nanofluidic channels via a reversal procedure [141,142], respectively. Fabricated nanoscale fluidic channels are shown in Fig.…”

Section: Nanofluidic Channelsmentioning

confidence: 99%

Applications of nanoimprint lithography/hot embossing: a review

Chen

2015

Appl. Phys. A

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This review concentrates on the applications of nanoimprint lithography (NIL) and hot embossing for the fabrications of nanolectronic devices, nanophotonic metamaterials and other nanostructures. Technical challenges and solutions in NIL such as nanofabrication of templates, removal of residual resist, pattern displacement in thermal NIL arising from thermal expansion are first discussed. In the nanofabrication of templates, dry etch in plasma for the formation of multi-step structures and ultra-sharp tip arrays in silicon, nanophotonic chiral structures with high aspect ratio in SiC are demonstrated. A bilayer technique for nondestructive removal of residual resist in thermal NIL is described. This process is successfully applied for the fabrication of T-shape gates and functional high electron mobility transistors. However, pattern displacement intrinsically existing in thermal NIL/hot embossing owing to different thermal expansions in the template and substrate, respectively, limits its further development and scale-up. Low temperature even room temperature NIL (RTNIL) was then proposed on HSQ, trying to eliminate the pattern distortion by avoiding a thermal loop in the imprint. But, considerable pressure needed in RTNIL turned the major attentions to the development of UVcuring NIL in UV-curable monomers at low temperature. A big variety of applications by low-temperature UV-curing NIL in SU-8 are described, including high-aspect-ratio phase gratings, tagging technology by nanobarcode for DNA sequencing, nanofluidic channels, nanophotonic metamaterials and biosensors. Hot embossing, as a parallel technique to NIL, was also developed, and its applications on ferroelectric polymers as well as metals are reviewed. Therefore, it is necessary to emphasize that this review is mainly attempted to review the applications of NIL/embossing instead of NIL technique advances.

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“…Much larger numbers of diffractive codes can be manufactured by nano-imprinting into the surface of the particles. 63 Diffraction gratings manufactured by this method are shown in the SEM images in Fig. 19(A) and (B), whilst Fig.…”

Section: Diffractive and Holographic Encodingmentioning

confidence: 99%

Microparticle encoding technologies for high-throughput multiplexed suspension assays

2009

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The requirement for analysis of large numbers of biomolecules for drug discovery and clinical diagnostics has driven the development of low-cost, flexible and high-throughput methods for simultaneous detection of multiple molecular targets in a single sample (multiplexed analysis). The technique that seems most likely to satisfy all of these requirements is the multiplexed suspension (bead-based) assay, which offers a number of advantages over alternative approaches such as ELISAs and microarrays. In a bead based assay, different probe molecules are attached to different beads (of a few tens of microns in size), which are then reacted in suspension with the target sample. After reaction, the beads must be identifiable in order to determine the attached probe molecule, and thus each bead must be labelled (encoded) with a unique identifier. A large number of techniques have been proposed for encoding beads. This critical review analyses each technology on the basis of its ability to fulfil the practical requirements of assays, whilst being compatible with low-cost, high-throughput manufacturing processes and high-throughput detection methods. As a result, we identify the most likely candidates to be used for future integrated device development for practical applications.

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Fabrication of diffraction-encoded micro-particles using nano-imprint lithography

Cited by 15 publications

References 27 publications

Magnetic biosensor technologies for medical applications: a review

Magnetic biosensor technologies for medical applications: a review

Applications of nanoimprint lithography/hot embossing: a review

Microparticle encoding technologies for high-throughput multiplexed suspension assays

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