Fabrication of diffractive microlens array by femtosecond laser-assisted etching process

Luo, Shao-Wei; Chang, Tien-Li; Tsai, Hsiang‐Lin

doi:10.1016/j.mee.2012.05.024

Cited by 18 publications

(7 citation statements)

References 25 publications

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“…It should be noted that the intrinsic quartz doesn't react with HF similar to silicon wafer (as mentioned before). In a similar study with nearly same fundamental parameters, they also optimized the laser power and aspect ratio for the fabrication of micro-lens array [99] and V-shaped micro prism [100]. But in general, the 3D pattern's pitch and aspect ratio is mainly controlled by etching concentration and processing time.…”

Section: D Structuresmentioning

confidence: 99%

Laser Ablation and Laser-Hybrid Ablation Processes: A Review

Ahmed¹,

Darwish²,

Alahmari³

2015

Materials and Manufacturing Processes

101

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Laser beam machining (LBM) has proven its applications and advantages over almost all the range of engineering materials. It offers its competences from macro machining to micro and nano-machining of simple-to-complex shapes. The hybrid approaches in laser ablation have demonstrated much improved results in terms of material removal rate, surface integrity, geometrical tolerances, thermal damage, metallurgical alterations and many more. The flipside of LBM is the existence of universal problems associated with its thermal ablation mechanism. In order to alleviate or reduce the inherent problems of LBM, a massive research has been done during the past decade in order to build a relatively new route of laser-hybrid processes. This paper reviews the research work carried out so far in the area of LBM and its hybrid processes for different materials and shapes. The article also highlights the research gaps and future research directions in the context of laser and laser-hybrid ablation.

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Section: D Structuresmentioning

confidence: 99%

Laser Ablation and Laser-Hybrid Ablation Processes: A Review

Ahmed¹,

Darwish²,

Alahmari³

2015

Materials and Manufacturing Processes

101

View full text Add to dashboard Cite

show abstract

“…It should be noted that the intrinsic quartz does not react with HF similar to silicon wafer (as mentioned before). In a similar study with nearly the same fundamental parameters, they also optimized the laser power and aspect ratio for the fabrication of micro-lens array [143] and V-shaped micro prism [144]. But in general, the 3D pattern's pitch and aspect ratio is mainly controlled by etching concentration and processing time.…”

Section: D Structuresmentioning

confidence: 99%

Laser Beam Machining, Laser Beam Hybrid Machining, and Micro-channels Applications and Fabrication Techniques

Darwish

Ahmed

Al‐Ahmari

2016

Advanced Structured Materials

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Laser beam machining (LBM) has proven its applications and advantages over almost all the range of engineering materials. It offers its competences from macro machining to micro and nano-machining of simple-to-complex shapes. The flipside of LBM is the existence of universal problems associated with its thermal ablation mechanism. In order to alleviate or reduce the inherent problems of LBM, a massive research has been done during the past decade and in turn build a relatively new route of laser-hybrid processes. The hybrid approaches in laser ablation have demonstrated much improved results in terms of material removal rate, surface integrity, geometrical tolerances, thermal damage, metallurgical alterations and many more. This chapter reviews the research work carried out so far in the area of LBM and its hybrid processes for different materials and shapes.

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“…Luo and Tsai [133] fabricated an array of square columns (see Fig. In a similar study with nearly the same fundamental parameters, they also optimized the laser power and aspect ratio for the fabrication of micro-lens array [143] and V-shaped micro prism [144]. They employed 15 wt% hydrofluoric acid (HF) for 15 min as etching agent.…”

Section: D Structuresmentioning

confidence: 99%