Fabrication of microfluidic devices using dry film photoresist for microchip capillary electrophoresis

Tsai, Yuan Chien; Jen, Hsiu Ping; Lin, Kuan Wen; Hsieh, You‐Zung

doi:10.1016/j.chroma.2005.12.003

Cited by 45 publications

(28 citation statements)

References 32 publications

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“…It is now commercially available for various kinds of dry film photoresists, and these films have recently been employed for applications besides the PCB industry, such as in labon-a-chip systems (Guijt et al 2011;Martinez-Duarte 2012). Tsai et al (2006) fabricated microchannels in dry films through a photolithographic technology to perform microchip capillary electrophoresis (CE). Similarly, dry films were also utilized by Vulto et al (2005) for fabricating channels to produce hybrid chips.…”

Section: Introductionmentioning

confidence: 99%

Fast fabrication of microfluidic devices using a low-cost prototyping method

Wang

Liu

et al. 2015

Microsyst Technol

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Section: Introductionmentioning

confidence: 99%

Fast fabrication of microfluidic devices using a low-cost prototyping method

Wang

Liu

et al. 2015

Microsyst Technol

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“…Одним из перспективных направлений в области аналитического приборо-строения является разработка микрофлюидных устройств, представляющих собой системы тонких каналов на поверхности различных материалов, таких как стекло [1], кремний [2], различные полимерные материалы [3]. Применение газохромато-графических колонок на плоскости в конструкции современных аналитических при-боров приводит не только к уменьшению габаритов приборов, но и к значительному снижению одного цикла анализа [4][5][6][7].…”

Section: Introductionunclassified

“…One of the promising directions in the field of analytical instrumentation is the development of microfluidic devices, which are systems of thin channels on the surface of various materials such as glass [1], silicon [2], various polymeric materials [3]. The use of gas chromatographic columns on the plane in the design of modern analytical devices leads not only to a reduction in the size of the devices, but also to a significant reduction in one cycle of analysis [4][5][6][7].…”

Section: Samara National Research University Samaramentioning

confidence: 99%

Пилларные МЭМС Колонки Для Газовой Хроматографии

Platonov¹,

Платонов²,

Платонов³

et al. 2018

sorpchrom

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В работе рассмотрены сорбционные и хроматографические свойства МЭМС колонок для газовой хроматографии пилларного и капиллярного типа, наполненных оксидом алюминия. Показано, что применение пилларных МЭМС колонок на плоскости позволяет на 30 % увеличить их эффективность хроматографического разделения по сравнению с колонками капиллярного типа аналогичной формы и сечения.

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“…To the best of our knowledge, there is only one additional report using the dry film resist as an integral part of the microchip. Tsai et al made a PDMS/dry film/PMMA microchip and used this for the separation of dopamine and catechol [16]. Microchannels were created in the dry film resist, which was laminated onto PMMA with pre-drilled access holes.…”

Section: Introductionmentioning

confidence: 99%

Dry film microchips for miniaturised separations

2009

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In this work microfluidic devices were made from the dry film photoresist Ordyl SY330, characterised by optical and electron microscopy and used for electrophoretic separations. A simple and fast microfabrication process was developed for the fabrication of channels that are 50 microm wide and 30 microm in height, requiring only the use of an office laminator, a hot plate, an exposure source and mask and an electric drill to make four microdevices in less than 1 h. The optical properties of the photoresist were studied and the resist showed significant absorbance below 370 nm and 570-630 nm, and had an optical transmission of 80% between 400 and 550 nm. Fluorescence emission over the region of maximum transmission was low allowing these devices to be used for fluorescence detection at 488/512 nm. Electrophoretic separation of APTS and three derivatised sugars was performed in 20 mM phosphate buffer, pH 2.5 with efficiencies of the three sugars of 40,000 plates (2,100,000 plates/m) within 30 s at a field strength of 500 V/cm. The simple fabrication process also allowed microchannels to be easily filled with chromatography particles before sealing, avoiding the challenging task of slurry packing, and the potential of these devices for liquid chromatography was demonstrated by the extraction of fluorescein onto anion exchange particles.

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Fabrication of microfluidic devices using dry film photoresist for microchip capillary electrophoresis

Cited by 45 publications

References 32 publications

Fast fabrication of microfluidic devices using a low-cost prototyping method

Fast fabrication of microfluidic devices using a low-cost prototyping method

Пилларные МЭМС Колонки Для Газовой Хроматографии

Dry film microchips for miniaturised separations

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