Fabrication of suspended microchannel resonators with integrated piezoelectric transduction

Pastina, Annalisa De; Maillard, Damien; Villanueva, Luis Guillermo

doi:10.1016/j.mee.2018.02.011

Cited by 31 publications

(24 citation statements)

References 21 publications

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“…LDV measurements [28][29][30] were performed with a UHF-120SV equipment (Polytec, Waldbronn, Germany) with the measurement setup shown in Fig. 1(c).…”

Section: Methodsmentioning

confidence: 99%

Frequency and damping effect of suspended silicon nitride membranes in water near the megahertz range

Wang

Mei

Friend

et al. 2020

J. Micromech. Microeng.

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Understanding the behavior of water-immersed membranes in the megahertz range is critical to develop novel acoustic metamaterials compatible with biomedical ultrasound applications. Herein, we study the influence of water on the resonance frequency and quality factor near the megahertz range of silicon nitride membranes fully immersed in water using laser Doppler vibrometry. The resonance frequency of silicon nitride membranes significantly decreases in water compared to air. For a 40 µm wide membrane, the resonance frequency is reduced from 11.2 MHz in air to 1.24 MHz after immersion in water, which is confirmed by finite element method simulations. Our results indicate that the water mass loading plays a major role in the resonance frequency reduction, with a ratio of water mass to membrane mass of m w a t e r / m m e m b r a n e ∼ 102 and NAVMI factors of Γ∼1.3. We attribute the main losses to acoustic radiation with small contributions from viscous damping. We estimate that silicon nitride membranes with widths below 50 µm are required to build negative metamaterials operating above 1 MHz. The large NAVMI factors suggest strong coupling between membrane motion and acoustic waves in water, which is important to develop metamaterials able to manipulate acoustic fields.

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“…LDV measurements [28][29][30] were performed with a UHF-120SV equipment (Polytec, Waldbronn, Germany) with the measurement setup shown in Fig. 1(c).…”

Section: Methodsmentioning

confidence: 99%

Frequency and damping effect of suspended silicon nitride membranes in water near the megahertz range

Wang

Mei

Friend

et al. 2020

J. Micromech. Microeng.

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“…In this regard, suspended microchannel resonators (SMR) have been demonstrated to be excellent tools for highly sensitive detection of both colloidal particles (measuring its buoyant mass) [ 14 , 15 , 16 , 17 ] and liquid properties (by measuring its mass density, viscosity, etc.) [ 18 , 19 , 20 , 21 , 22 ]. Among other nanomechanical techniques, SMR approach is characterized for placing a liquid inside the resonator while vibrating in vacuum or gaseous atmosphere.…”

Section: Introductionmentioning

confidence: 99%

Nanomechanical Molecular Mass Sensing Using Suspended Microchannel Resonators

Martín-Pérez

Ramos

Tamayo

et al. 2021

Sensors

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In this work we study the different phenomena taking place when a hydrostatic pressure is applied in the inner fluid of a suspended microchannel resonator. Additionally to pressure-induced stiffness terms, we have theoretically predicted and experimentally demonstrated that the pressure also induces mass effects which depend on both the applied pressure and the fluid properties. We have used these phenomena to characterize the frequency response of the device as a function of the fluid compressibility and molecular masses of different fluids ranging from liquids to gases. The proposed device in this work can measure the mass density of an unknown liquid sample with a resolution of 0.7 µg/mL and perform gas mixtures characterization by measuring its average molecular mass with a resolution of 0.01 atomic mass units.

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“…Thin-film transducers made of AlN are structurally and chemically stable, they have a low dielectric and mechanical loss, they are compatible with standard siliconbased CMOS microfabrication techniques. Academic applications of AlN thin-film transducers include RF filters, 24 suspended microchannel resonators, 25 contour mode resonators, 26 switches, 27,28 and accelerometers. 29 AlN thin-film have been deposited on substrates of sapphire, crystal quartz, fused silica, and silicon, 30 and on 30-µm-thick Si membranes.…”

Section: Introductionmentioning

confidence: 99%

Bulk acoustofluidic devices driven by thin-film transducers and whole-system resonance modes

Steckel,

Bruus

2021

Preprint

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In acoustofluidics, acoustic resonance modes for fluid and microparticle handling are traditionally excited by bulk piezoelectric transducers. In this work, we demonstrate by numerical simulations in three dimensions (3D) that integrated piezoelectric thin-film transducers constituting less than 0.1% of the device work equally well. The simulations are done using a well-tested and experimentally validated numerical model. Our proof-of-concept example is a water-filled straight channel embedded in a mm-sized glass chip with a 1-µm thick thin-film transducer made of Al 0.6 Sc 0.4 N . We compute the acoustic energy, streaming, and radiation force, and show that it is comparable to that of a conventional silicon-glass device actuated by a bulk PZT transducer. The ability of the thin-film transducer to create the desired acoustofluidic effects in bulk acoustofluidic devices rely on three physical aspects: The inplane-expansion of the thin-film transducer under the orthogonal applied electric field, the acoustic whole-system resonance of the device, and the high Q-factor of the elastic solid constituting the bulk part of the device. Consequently, the thin-film device is surprisingly insensitive to the Q-factor and resonance properties of the thin-film transducer.

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Fabrication of suspended microchannel resonators with integrated piezoelectric transduction

Cited by 31 publications

References 21 publications

Frequency and damping effect of suspended silicon nitride membranes in water near the megahertz range

Frequency and damping effect of suspended silicon nitride membranes in water near the megahertz range

Nanomechanical Molecular Mass Sensing Using Suspended Microchannel Resonators

Bulk acoustofluidic devices driven by thin-film transducers and whole-system resonance modes

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