Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate

Ping, 徐平 Xu; Yan-yan, 黄燕燕 Huang; Xu-lin, 张旭琳 Zhang; Wei, 杨 伟 Yang; Wen-da, 彭文达 Peng

doi:10.3788/ope.20192701.0129

光学精密工程

2019

DOI: 10.3788/ope.20192701.0129

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Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate

徐平 Xu Ping¹,

黄燕燕 Huang Yan-yan²,

张旭琳 Zhang Xu-lin³

et al.

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Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate

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