Fabrication, surface integration and testing of miniaturized dielectric barrier discharge plasma actuators for active flow control applications

Lindner, Matthias; Berndt, Dominik; Ehrlich, Ingo; Schreiner, Rupert; Pipa, A. V.; Hink, Rüdiger; Foest, Rüdiger; Brandenburg, Ronny; Max, Alexander; Caspari, Ralf

doi:10.2514/6.2019-2998

Cited by 4 publications

(11 citation statements)

References 13 publications

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“…Since the erosion of MEMS-fabricated SDBDs [35,36] is of extraordinary importance for the durability of the device, erosion studies can already be found in the literature [16,32,33,37]. It was shown that tungsten (W) [16,33,37] has a good resistance against the destructive forces of the low-temperature plasma.…”

Section: Mems Fabricationmentioning

confidence: 99%

“…It was shown that tungsten (W) [16,33,37] has a good resistance against the destructive forces of the low-temperature plasma. In [32], we reported on the erosion of the commonly used Cr/Cu electrodes and also showed that a protective layer of gold (Au) restricts the erosion only to a certain degree. In the same study Cr/Ni electrodes [32] were found to be the most suitable electrode metals in terms of erosion.…”

Section: Mems Fabricationmentioning

confidence: 99%

“…In [32], we reported on the erosion of the commonly used Cr/Cu electrodes and also showed that a protective layer of gold (Au) restricts the erosion only to a certain degree. In the same study Cr/Ni electrodes [32] were found to be the most suitable electrode metals in terms of erosion. The present study now compares the Cr/Ni electrode erosion to the tungsten electrode erosion.…”

Section: Mems Fabricationmentioning

confidence: 99%

“…The ability to manufacture SDBDs with extremely thin and fine structured electrodes is the main advantage of the MEMS-technology. However, the thin electrodes can exhibit strong erosion under the aggressive discharge environment [32]. Minimization of electrode erosion is the main challenge MEMS-technology has to deal with.…”

Section: Introductionmentioning

confidence: 99%

“…Minimization of electrode erosion is the main challenge MEMS-technology has to deal with. For this purpose our previous studies on the electrode material [32] were expanded in this work. The degradation of the dielectric material can be avoided by using inorganic substrates [33].…”

Section: Introductionmentioning

confidence: 99%

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Icing Mitigation by MEMS-Fabricated Surface Dielectric Barrier Discharge

et al. 2021

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Avoiding ice accumulation on aerodynamic components is of enormous importance to flight safety. Novel approaches utilizing surface dielectric barrier discharges (SDBDs) are expected to be more efficient and effective than conventional solutions for preventing ice accretion on aerodynamic components. In this work, the realization of SDBDs based on thin-film substrates by means of micro-electro-mechanical-systems (MEMS) technology is presented. The anti-icing performance of the MEMS SDBDs is presented and compared to SDBDs manufactured by printed circuit board (PCB) technology. It was observed that the 35 μm thick electrodes of the PCB SDBDs favor surface icing with an initial accumulation of supercooled water droplets at the electrode impact edges. This effect was not observed for 0.3 μm thick MEMS-fabricated electrodes indicating a clear advantage for MEMS-technology SDBDs for anti-icing applications. Titanium was identified as the most suitable material for MEMS electrodes. In addition, an optimization of the MEMS-SDBDs with respect to the dielectric materials as well as SDBD design is discussed.

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Section: Mems Fabricationmentioning

confidence: 99%

Section: Mems Fabricationmentioning

confidence: 99%

Section: Mems Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Icing Mitigation by MEMS-Fabricated Surface Dielectric Barrier Discharge

et al. 2021

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Influence of dielectric thickness and electrode structure on the ion wind generation by micro fabricated plasma actuators

Hink

Pipa

Schäfer

et al. 2020

J. Phys. D: Appl. Phys.

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Surface dielectric barrier discharges are investigated in order to explore the combined effects of barrier thickness and microstructure of the exposed electrode on the ion wind generation. Actuators with straight and structured high voltage electrodes with characteristic sizes of 200 and 250 µm and dielectric thicknesses of 0.5, 1 and 2 mm are compared. It is observed that: i) actuator efficiency of ion wind generation strongly depends on the applied voltage amplitude; ii) operation voltage depends on the dielectric thickness logarithmically; iii) electrode microstructure slightly increases the dynamic pressure (few percent in maximum), however the effect decreases with thicker dielectrics and smaller electrode structures; iv) the pattern of the most intensive discharge parts as well as the dielectric erosion repeats the regular structure of the electrodes down to 200 µm. Several identical samples are tested during different days to estimate the impact of the air humidity and the degradation of the dielectric. The microscale precision of the sample manufacture was accomplished by a commercial facility for printed circuit boards.

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Expansion of surface barrier discharge scrutinized

Lindner

Pipa²,

Brandenburg³

et al. 2022

Plasma Sources Sci. Technol.

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Developing the fundamentals for the electrical diagnostics of surface dielectric barrier discharges (SDBDs) is of enormous importance for several applications, for example, ﬂow control and gas cleaning. The main challenge is to account for the discharge expansion along the dielectric surface. Typically, a linear expansion with the amplitude of the applied voltage is observed. In this work, we report on a step-wise SDBD expansion along the Al2O3 dielectric surface. More speciﬁc, the discharge occupied a certain area after ignition, which remained constant until the voltage exceeded the critical amplitude VL. This absence of expansion is seen as a linear dependence of the discharge power on the applied voltage and it was additionally conﬁrmed by photographs with long exposure times. This novel phenomenon is more pronounced for thicker dielectrics. It is suggested that the derivative of the charge-voltage characteristics can be used for the determination of all essential parameters of the simplest equivalent circuit of SDBDs. Moreover, it was shown that the derivative of the charge-voltage characteristics for the positive half-cycle of the discharge agrees numerically with the voltage dependence of the reactor capacitance derived from photographs. This agreement between both measurement methods indicates a similar step-wise expansion of the SDBD even if a voltage amplitude above VL is applied.

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Fabrication, surface integration and testing of miniaturized dielectric barrier discharge plasma actuators for active flow control applications

Cited by 4 publications

References 13 publications

Icing Mitigation by MEMS-Fabricated Surface Dielectric Barrier Discharge

Icing Mitigation by MEMS-Fabricated Surface Dielectric Barrier Discharge

Influence of dielectric thickness and electrode structure on the ion wind generation by micro fabricated plasma actuators

Expansion of surface barrier discharge scrutinized

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