Abstract:Optimal multi-layer device design requires consideration of fabrication uncertainties associated with inter-layer alignment and conformal layering. We present layer-restricted topology optimization (TO), which we believe to be a novel technique which mitigates the effects of unwanted conformal layering for multi-layer structures and enables TO in multi-etch material platforms. We explore several approaches to achieve this result compatible with density-based TO projection techniques and geometric constraints. … Show more
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