Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities

Abstract

Electrohydrodynamic instability patterning (EHDIP) as an alternative patterning method has attracted a great deal of attention over the past decade. This article demonstrates the faithful transfer of patterns with a high aspect ratio onto a polymer film via electrohydrodynamic instabilities for a given patterned grating mask. We perform a simple mathematical analysis to determine the influence of process parameters on the pressure difference ∆P. Through numerical simulation, it is demonstrated that thick films subject to large electric fields are essential to realize this faithful replication. In particular, the influence of the material properties of the polymer on pattern replication is discussed in detail. It is found that, to achieve the smaller periodic patterns with a higher resolution, film with a larger value of the dielectric constant and smaller value of the surface tension should be chosen. In addition, an ideal replication of the mask pattern with a short evolution time is possible by reducing the viscosity of the polymer liquid. Finally, the experiments of the pattern replication with and without defects are demonstrated to compare with the numerical simulation results. It is found that experiments are in good agreement with the simulation results and prove that the numerical simulation method provides an effective way to predict faithful replication.

Parametric scheme for rapid nanopattern replication via electrohydrodynamic instability

“…Pattern replication is not exclusively governed by l m throughout the entire pattern growth process. Based on simulations, 38,44 the initial pattern formation always follows a length scale close to that of l p regardless of l m /l p when electrohydrodynamic instability is induced by the master patterninduced (l p ) spatially modulated electric eld. However, the later stages of the time evolution are governed by l m as well as l p , thus determining the nal morphology of the replicated structures for long processing times.…”

Influence of electrode types on the electrohydrodynamic instability patterning process: a comparative study

“…Some similar experiments are conducted. The article 38 demonstrates the faithful transfer of patterns with a high aspect ratio onto a polymer lm via electrohydrodynamic instabilities for a given patterned grating mask. In the experiment, grating structures can be obtained when the lm thickness is set at 16 and 23 mm, which is consistent with the rule of chosen the lm thickness mentioned previously.…”

Combining parallel pattern generation of electrohydrodynamic lithography with serial addressing

“…6 Recent papers elaborate on improvements in aspect ratio 8,9 and summarize the parameters inuencing the faithfulness of pattern replication. 10 A strong aspect of EHDL is that a wide range of materials can be directly patterned. Patterns of titanium oxide have been created by combining sol-gel processing with EHDL.…”

“… 6 Recent papers elaborate on improvements in aspect ratio 8,9 and summarize the parameters influencing the faithfulness of pattern replication. 10 …”