Features of Obtaining Multicomponent Magnetron Targets for the Formation of Non-Porous Transformation-Hardenable Coatings of a Given Composition

Abstract

The technological process of thin-film sputtering significantly depends on the quality of the target for magnetron sputtering. This paper presents the features of obtaining the multicomponent magnetron target for the formation of non-porous transformation-hardenable coatings by the method of impact electric pulse consolidation. Special considerartion is given to the blend preparation and technological parameters of compaction. Blend powder consolidation under impact electric pulse compaction at different speeds of the striker has been investigated. At high speeds of the drop-hammer striker, the time parameters of the dynamic impact and electric pulse heating of the powder billet are shown to superpose, which leads to the final consolidation of the ceramic blend of the target for magnetron sputtering. The use of the technology of impact electric pulse compaction has made it possible to obtain multicomponent magnetron targets for formation of non-porous transformation-hardenable coatings of a given composition.