The microstructure and magnetic properties of cobalt ferrite thin films deposited by the sputtering method on an Fe 3 O 4 under-layer were investigated at different post-annealing temperatures. Results show that the Fe 3 O 4 under-layer can accelerate the grain growth of cobalt ferrite films due to the phase transformation of the Fe 3 O 4 under-layer at about 400°C-500°C. By introducing the Fe 3 O 4 under-layer, cobalt ferrite nanocrystalline thin films with high coercivity can be obtained at lower post-annealing temperatures. magnetic materials, magnetic thin films, cobalt ferrite PACS: 75.70.-i, 75.50.Ss, 75.50.Vv