Fib Mask Repair With Microtrim

He has co-authored more than 130 publications in SCI journals and supervised several master's, PhD, and postdoctoral students. He has published a number of books and book chapters. His research interests are focused on ion implantation, radiation-induced modification of materials/nanomaterials, synthesis of nanomaterials/ thin films, and ion beam analysis of materials. He is a senior fellow of UNESCO UNISA AFRICA Chair in Nanosciences/Nanotechnology, South Africa. He was a TWAS-UNESCO-iThemba LABS research associate from 2014 to 2016. He obtained his PhD at the Graduate University of the Chinese Academy of Sciences, China. Tingkai Zhao is currently working as a full time professor in the School of Materials Science and Engineering of Northwestern Polytechnical University (NPU) and received his PhD degree from Xi'an Jiaotong University (XJTU), China, in 2005. He has visited Northwestern University (Evanston, USA) and the University of Oxford (Oxford, UK) as a visiting scholar. As the Director of the NPU-NCP Joint International Research Center on Advanced Nanomaterials & Defects Engineering, and the Vice-Director of ShaanxiEngineering Laboratory for Graphene New Carbon Materials & Applications, his research group mainly investigates the synthesis, structure, and performance of advanced carbon materials such as carbon nanotubes, graphene, 2D nanomaterials, carbon foam, and their applications in composites, energy conversion (solar cell, supercapacitor, and Li-ion batteries), smart devices, and biosensors. He has published two books, 10 Chinese invention patents, and more than 130 academic articles in SCI journals, and also obtained more than 25 awards and honors such as first prize in the Shaanxi Science and Technology Awards in 2013, first and second prizes in the College Science and Technology Awards of Shaanxi Province in 2013, etc. He has written four scientific reports in China Science Daily newspapers covering his research achievements. He has also been elected as a director of the Xi'an Nanoscience & Technology Society.

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Fib Mask Repair With Microtrim

Cited by 7 publications

References 5 publications

Elimination of substrate damage in focused-ion-beam repair of photomask

Elimination of substrate damage in focused-ion-beam repair of photomask

Recent progress in ion beam lithography

Ion Beam Techniques and Applications

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