FIB-SEM Instrument with Integrated Raman Spectroscopy for Correlative Microscopy

Jiruše, Jaroslav; Haničinec, Martin; Havelka, Miloslav; Hollricher, O.; Ibach, Wolfram; Spizig, Peter

doi:10.1017/s1431927614006679

Cited by 8 publications

(3 citation statements)

References 2 publications

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“…The combination of SEM and Raman microscopy requires the use of a precise stage and an image repositioning tool to transfer the sample in the SEM chamber from the SEM position under the pole piece to the Raman position as indicated in the photograph (Figure b). To generate a precise stage movement a high level of integration in the software is required . The precision of the transition is within a few micrometres and subsequently the ROI is located under the optical objective lens rather in its focus and in the same lateral position as before under the SEM objective lens.…”

Section: Methodsmentioning

confidence: 99%

The Combination of Electron Microscopy, Raman Microscopy and Energy Dispersive X‐Ray Spectroscopy for the Investigation of Polymeric Materials

Schmidt

Fitzek

Nachtnebel

et al. 2019

Macromolecular Symposia

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Polymers play an important role in materials science, because of their advantages over other types of materials. The huge variety in terms of the types, arrangements and combinations of monomers found in polymers leads to an extremely wide diversity of different polymeric materials. Although there is a wide range of analytical techniques to characterize polymeric materials, here the focus is laid on a novel correlative microscopy method, combining Raman microscopy, scanning electron microscopy (SEM) and energy dispersive X‐ray spectroscopy (EDXS). Therefore, three polymeric specimens were analysed by the new system RISE (Raman Imaging and Scanning Electron microscopy) in combination with EDXS. The aim of this contribution is to demonstrate the potential of the new system to characterize different polymeric layers, as well as fillers and additives in polymeric materials. In addition to the results, a methodical chapter deals with preparation aspects, investigation skills and imaging modes of the electron microscope. Here the so‐called variable pressure mode (VP) is mentioned, where nitrogen is used as imaging gas at pressures between 10 and 133 Pa. Furthermore, the low‐voltage mode in the high vacuum is discussed which gives a better surface resolution due to a smaller interaction volume of the electrons in the material and furthermore causes lower beam damage. Both modes work without a conductive coating on the specimen, which is a requirement for Raman investigations. Further capabilities of the RISE system in combination with the EDXS will be discussed afterwards.

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Section: Methodsmentioning

confidence: 99%

The Combination of Electron Microscopy, Raman Microscopy and Energy Dispersive X‐Ray Spectroscopy for the Investigation of Polymeric Materials

Schmidt

Fitzek

Nachtnebel

et al. 2019

Macromolecular Symposia

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“…Furthermore, compact RMs for integration in scanning electron microscopes are commercially available. The details of the integration vary as the light enters the vacuum chamber through direct coupling, or through an optical fiber to connect to a remote spectrometer …”

Section: Introductionmentioning

confidence: 99%

Integration of correlative Raman microscopy in a dualbeam FIB SEM

Timmermans

Liszka

Lenferink

et al. 2016

J Raman Spectroscopy

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We present an integrated confocal Raman microscope in a focused ion beam scanning electron microscope (FIB SEM). The integrated system enables correlative Raman and electron microscopic analysis combined with focused ion beam sample modification on the same sample location. This provides new opportunities, for example the combination of nanometer resolution with Raman advances the analysis of sub-diffraction-sized particles. Further direct Raman analysis of FIB engineered samples enables in situ investigation of sample changes. The Raman microscope is an add-on module to the electron microscope. The optical objective is brought into the sample chamber, and the laser source, and spectrometer are placed in a module attached onto and outside the chamber. We demonstrate the integrated Raman FIB SEM function with several experiments. First, correlative Raman and electron microscopy is used for the investigation of (sub-)micrometer-sized crystals. Different crystals are identified with Raman, and in combination with SEM the spectral information is combined with structurally visible polymorphs and particle sizes. Analysis of sample changes made with the ion beam is performed on (1) structures milled in a silicon substrate and (2) after milling with the FIB on an organic polymer. Experiments demonstrate the new capabilities of an integrated correlative Raman-FIB-SEM. Copyright

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“…In the surface-enhanced Raman microscopy (SERS) the molecules to be analyzed are adsorbed on rough surfaces, such as partially metal-coated plasma etched polystyrene spheres. This substrate is nonconductive, thus correlative SEM and Raman imaging [4] requires low primary energies and very low probe currents, see Figure 2C.…”

mentioning

confidence: 99%