2017
DOI: 10.1051/matecconf/201713900200
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Fiber fabry-pero micro pressure sensor

Abstract: Abstract:A new fiber fabry-perot pressure sensor is designed. It is made by photolithography, silicon wafer etching, anode bonding, microelectromechanical system technology and so on. It is suitable for the pressure measurement of micro-pressure environment under harsh environment and small space. The structure of the transmitter and the way to make it are described in detail. The design smartly uses the Fiber optic flange, the optical fiber end face is parallel to the sensitive film, thus a high-quality Fabry… Show more

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