2009
DOI: 10.1109/irps.2009.5173316
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Field effect diode for effective CDM ESD protection in 45 nm SOI technology

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Cited by 14 publications
(7 citation statements)
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“…Here, the p-n junctions sandwiched between the anode and the cathode are gate-induced, rather than built-in (doped-in), and thus, there is no need for precise control of the film doping profile, and the nearly intrinsic SOI film has higher carrier lifetime, and improves the state 1 retention (i.e., t rest ). Although a somewhat relaxed geometry FED was used here for proof of concept purposes, our previous results [10], [11], [17] suggest that it should be possible to design FED memory cells of superior scalability and performance: the gap length between gates G1 and G2 can be shrunk down to the technological limit without affecting the FED properties very much [18]. In fact, it is possible to push scaling even further (down to the 20-nm node according to our simulations [19]) using advanced FEDs, such as double-gate (DG), gate-all-around (GAA), and other multigate (MuG) structures, where the gate control of the channel is stronger.…”
Section: Discussionmentioning
confidence: 99%
“…Here, the p-n junctions sandwiched between the anode and the cathode are gate-induced, rather than built-in (doped-in), and thus, there is no need for precise control of the film doping profile, and the nearly intrinsic SOI film has higher carrier lifetime, and improves the state 1 retention (i.e., t rest ). Although a somewhat relaxed geometry FED was used here for proof of concept purposes, our previous results [10], [11], [17] suggest that it should be possible to design FED memory cells of superior scalability and performance: the gap length between gates G1 and G2 can be shrunk down to the technological limit without affecting the FED properties very much [18]. In fact, it is possible to push scaling even further (down to the 20-nm node according to our simulations [19]) using advanced FEDs, such as double-gate (DG), gate-all-around (GAA), and other multigate (MuG) structures, where the gate control of the channel is stronger.…”
Section: Discussionmentioning
confidence: 99%
“…We have shown that field-effect diodes (FEDs) have superior characteristics over silicon-on-insulator metal-oxide-semiconductor field-effect transistors (SOI-MOSFETs) due to suppressed short-channel effects [2]- [4]. FEDs have been used for electrostatic-discharge protection [5]- [7] and memory-cell applications [8], [9].…”
Section: Performance Assessment Of Nanoscalementioning
confidence: 99%
“…3) and the field-effect diode (FED) (Fig. 4) were developed [23][24][25] based on the structures proposed in [26][27][28]. These devices combine the features of a P-N-P-N SCR to block leakage current during normal operating conditions, with a forward-biased P-N junction diode to shunt high current rapidly during ESD.…”
Section: Scr Structurementioning
confidence: 99%