“…However, the typical QCM has the size of about 1 cm 2 , the frequency of 5–20 MHz and the gram-levels base mass because of the bulk structure, which results in a large detection limit, thick substrate and the difficulty to integrate with the electronics. During the last few years, film bulk acoustic resonator (FBAR), a promising micro-electromechanical bulk acoustic resonator, is popular for low-cost, label-free and highly sensitive detection of gas [ 13 , 14 , 15 , 16 ] and biochemical species [ 17 , 18 , 19 , 20 ]. By using micron-thick piezoelectric ZnO or AlN thin film, FBAR brings a very high resonant frequency from sub-GHz to 10 GHz and a low detection limit down to the monomolecular level.…”