Fine patterning of ceramic thick layer on aerosol deposition by lift-off process using photoresist

Akedo, Jun; Park, Jae-Hyuk; Tsuda, Hitoshi

doi:10.1007/s10832-007-9385-y

Cited by 16 publications

(5 citation statements)

References 16 publications

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“…High deposition rate (i.e. over 30 μm/min for deposition of PZT film with area of 5 mm × 5 mm), low process temperature as well as micropatterning of PZT during deposition (without etching) [96] are very attractive for MEMS and μ-TAS (micro-total analysis system) applications [93,97,98]. …”

Section: Materials For High Frequency Ultrasonic Transducersmentioning

confidence: 99%

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Zhou

Lau

et al. 2011

Progress in Materials Science

313

205

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Piezoelectric films have recently attracted considerable attention in the development of various sensor and actuator devices such as nonvolatile memories, tunable microwave circuits and ultrasound transducers. In this paper, an overview of the state of art in piezoelectric films for high frequency transducer applications is presented. Firstly, the basic principles of piezoelectric materials and design considerations for ultrasound transducers will be introduced. Following the review, the current status of the piezoelectric films and recent progress in the development of high frequency ultrasonic transducers will be discussed. Then details for preparation and structure of the materials derived from piezoelectric thick film technologies will be described. Both chemical and physical methods are included in the discussion, namely, the sol–gel approach, aerosol technology and hydrothermal method. The electric and piezoelectric properties of the piezoelectric films, which are very important for transducer applications, such as permittivity and electromechanical coupling factor, are also addressed. Finally, the recent developments in the high frequency transducers and arrays with piezoelectric ZnO and PZT thick film using MEMS technology are presented. In addition, current problems and further direction of the piezoelectric films for very high frequency ultrasound application (up to GHz) are also discussed.

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Section: Materials For High Frequency Ultrasonic Transducersmentioning

confidence: 99%

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Zhou

Lau

et al. 2011

Progress in Materials Science

313

205

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“…The ADM is based on the consolidation of ultrafine ceramic particles through impact with a substrate after the particles are accelerated by a carrier gas and a nozzle. The details of the ADM apparatus have been reported elsewhere 16,17 . Al 2 O 3 thick films were deposited on flat Cu substrates.…”

Section: Introductionmentioning

confidence: 99%

Growth Process of α‐Al₂O₃ Ceramic Films on Metal Substrates Fabricated at Room Temperature by Aerosol Deposition

Lee

Kim

et al. 2011

Journal of the American Ceramic Society

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The aerosol deposition method (ADM) is a novel coating process that works at room temperature without a high-temperature plasma and arc discharge, unlike the existing thermal spray coating. The bonding of the sprayed ceramic particles in this process is based on shock loading solidification, resulting from the impact of ceramic particles-it forms a dense, uniform, and hard ceramic layer at room temperature. However, its deposition mechanism has not been fully clarified. To clarify the growth mechanism during ADM, the initial growth stages of Al 2 O 3 films were investigated through observation of their microstructures. A series of observations confirmed that the bonding mechanism of substrate particles is related to plastic deformation, combined with an anchoring layer formed between the Al 2 O 3 layer and the Cu substrate. In addition, particle-to-particle bonding was caused by the plastic deformation as well as fractures of the starting ceramic particles. This cracking of particles was supposed by a broadening of the X-ray diffraction pattern and decrease in crystallite size with an increasing number of scans. The results of atomic force microscopic images and surface profiles showed that these phenomena, such as the plastic deformation and the cracking of particles, result from the hammering effect of a bombardment by the subsequent particles.

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“…Aerosol deposition has been reported to achieve dense, crack-free ceramic films based on the impact and consolidation phenomenon of ceramic particles at room temperature with a high deposition rate. Patterning can be achieved by successive lift-off process [ 90 ]. Compared with other fabrication techniques, screen-printing is a relatively simple way to fabricate patterned films with reasonable quality and excellent reproducibility.…”

Section: Design and Modellingmentioning

confidence: 99%

Acoustic Devices for Particle and Cell Manipulation and Sensing

Qiu

Wang

Démoré

et al. 2014

Sensors

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An emerging demand for the precise manipulation of cells and particles for applications in cell biology and analytical chemistry has driven rapid development of ultrasonic manipulation technology. Compared to the other manipulation technologies, such as magnetic tweezing, dielectrophoresis and optical tweezing, ultrasonic manipulation has shown potential in a variety of applications, with its advantages of versatile, inexpensive and easy integration into microfluidic systems, maintenance of cell viability, and generation of sufficient forces to handle particles, cells and their agglomerates. This article briefly reviews current practice and reports our development of various ultrasonic standing wave manipulation devices, including simple devices integrated with high frequency (>20 MHz) ultrasonic transducers for the investigation of biological cells and complex ultrasonic transducer array systems to explore the feasibility of electronically controlled 2-D and 3-D manipulation. Piezoelectric and passive materials, fabrication techniques, characterization methods and possible applications are discussed. The behavior and performance of the devices have been investigated and predicted with computer simulations, and verified experimentally. Issues met during development are highlighted and discussed. To assist long term practical adoption, approaches to low-cost, wafer level batch-production and commercialization potential are also addressed.

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Fine patterning of ceramic thick layer on aerosol deposition by lift-off process using photoresist

Cited by 16 publications

References 16 publications

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Growth Process of α‐Al₂O₃ Ceramic Films on Metal Substrates Fabricated at Room Temperature by Aerosol Deposition

Acoustic Devices for Particle and Cell Manipulation and Sensing

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Fine patterning of ceramic thick layer on aerosol deposition by lift-off process using photoresist

Cited by 16 publications

References 16 publications

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Growth Process of α‐Al2O3 Ceramic Films on Metal Substrates Fabricated at Room Temperature by Aerosol Deposition

Acoustic Devices for Particle and Cell Manipulation and Sensing

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Product

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Growth Process of α‐Al₂O₃ Ceramic Films on Metal Substrates Fabricated at Room Temperature by Aerosol Deposition