Owing to high quantum efficiency, adjustable composition and antioxidation properties of oxynitride phosphors, extensive investigations have focused on their photoluminescence properties under low-energy light excitation (UV or blue light). However, the vacuum ultraviolet (VUV) luminescence properties of oxynitride phosphors are rarely researched. Present work studies the structure and VUV luminescence properties of an oxynitride phosphor: AlON: Eu, Mg, which is synthesized by solid-state reaction. Under 147 nm excitation, it was found that AlON: Eu, Mg phosphor shows a blue emission band centered at about 470 nm. The first principle calculation is used to analyze the origin of the VUV absorption. Compared with BaMgAl10O17: Eu2+ phosphor, AlON: Eu, Mg phosphor shows better thermal stability.