Flexible Electromagnetic Tactile Sensor Based on Double‐Layer High‐Density MEMS Coils and Tilted Magnetic Column Array

Abstract

With the rapid development of wearable devices, tactile sensors have received extensive attention as supplements to vision and hearing. However, it remains challenging for a single tactile sensor to generate distinguishable electrical signals when receiving mechanical stimuli in different directions. Herein, a novel flexible electromagnetic tactile sensor (FETS) prepared by combining flexible double‐layer coils and a flexible tilted magnetic column array (TMCA) is presented. Flexible double‐layer high‐density coils are fabricated using the micro‐electromechanical system (MEMS) technology. The turns of the coil (1 × 1 cm) are 100, while both the line width and spacing of turns are 40 µm. TMCA is prepared using a template and magnetized along the axis direction. When a pulling force or pressure is applied to the TMCA, the magnetic flux decreases or increases correspondingly, allowing the FETS to accurately distinguish stimuli and produce different signals (−/+ or +/−). The FETS presents a sensitivity of up to 21.7 µV kPa−1 (0.05–10 kPa), a minimal magnetic field detection limit of 10 mT, a low‐pressure detection limit of 5 g, and good repeatability (5000 cycles). Additionally, the FETS is applied in robotic tactile testing, Morse code, and noncontact magnetic field recognition. It has potential applications in the Internet of Things (IoT) and information communication.