Fluid Density Sensing Using Piezoelectric Micromachined Ultrasound Transducers

Roy, Kaustav; Gupta, Harshvardhan; Shastri, Vijayendra; Dangi, Ajay; Jeyaseelan, A. Antony; Dutta, Soma; Pratap, Rudra

doi:10.1109/jsen.2019.2936469

Cited by 41 publications

(21 citation statements)

References 25 publications

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“…Table 3 shows a comparison between different PMUTs systems as density sensors. Taking the highest sensitivity 21 , our PMUT achieves 1.6× improvement with a single and compact device. Furthermore, in comparison with other PMUTs, the AlScN PMUT reaches better sensitivity (2.5x that of ref.…”

Section: Resultsmentioning

confidence: 99%

“…Other alternatives based on the same operation principle have recently emerged; these methods use piezoelectric micromachined ultrasonic transducers (PMUTs), which require lower driving voltages than CMUTs facilitating their integration into microfluidic systems. One presented in 21 , is a PMUT-fluid-PMUT system with a sensitivity of 292.6 Hz/kg/m 3 when the PMUT side is 250 μm. However, a pair of PMUTs are needed and, only low viscosity fluids can be measured.…”

Section: Introductionmentioning

confidence: 99%

“…Different from our previous works 24 , 25 , in this paper AlN doped with Sc is used as the piezoelectric material, providing benefits in terms of piezoelectric transduction coefficients 26 . This single-cell or lab-on-chip for liquid characterization could be easily integrated in a microfluidic cell or hand-held devices of small size, which will make it competitive with respect to other systems 2 , 21 , 22 .…”

Section: Introductionmentioning

confidence: 99%

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Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

et al. 2022

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In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monolithically fabricated with a 130 nm complementary metal-oxide semiconductor (CMOS) process. The electrode configuration allows the entire system to be implemented in a single device, where one electrode is used as an input and the other as an output. Experimental verification was carried out by exploiting the features of piezoelectric devices such as resonators and acoustic transducers, where a frequency shift and amplitude variation are expected because of a change in density and viscosity. A sensitivity of 482 ± 14 Hz/kg/m3 demonstrates the potential of the system compared to other dual-electrode PMUTs. In addition, according to the acoustic measurement, the sound velocity, fluid compressibility, and viscosity coefficient can be extracted, which, to the best of our knowledge, is novel in these PMUT systems.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

et al. 2022

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“…The electromagnetic properties of light in conjunction with the penetrability of sound have made it possible to penetrate deeper and obtain information that is functional to the target thus probed. Pulsed LEDs and MUTs [24][25][26][27][28][29][30][31][32][33][34][35][36][37] have revolutionized the field further, thereby creating wearable photoacoustic devices. In this work, we have fabricated piezoelectric micromachined ultrasound transducers (PMUTs) using functional thin-film piezoelectric material and the nanofabrication tools and have demonstrated their use as a photoacoustic receiver.…”

Section: Introductionmentioning

confidence: 99%

A PMUT based photoacoustic system as a microfluidic concentration detector

Roy

Shastri

Kumar

et al. 2022

Photons Plus Ultrasound: Imaging and Sensing 2022

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We report on the development of a novel piezo-MEMS based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser. We fabricate both the PMUTs and the microfluidic channels and subsequently use them for the experiment. We also show the capability of PMUTs as a general photoacoustic receiver and demonstrate its signal-to-noise characteristics (~31) and its wide fractional bandwidth (~73%).

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“…Operating frequencies for PMUTs generally range from a few tens of kHz to hundreds of MHz. With a small footprint and low power draw, they find use in applications such as non destructive evaluation [2], photoacoustic imaging [3], [4], fingerprint sensing [5], range finding [6] and density sensing [7].…”

Section: Introductionmentioning

confidence: 99%

Data-Over-Sound With PMUTs

Gupta

Nayak

Ashok

et al. 2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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Data-over-sound is an emerging technology for digital communication which uses frequencies at the upper bounds of human hearing, usually between 15 kHz to 25 kHz. We report a successful development of Piezoelectric Micromachined Ultrasound Transducers (PMUTs) for low-power data-over-sound applications. Piezoelectric thin films used in PMUTs can have high residual tensile stresses ranging from 300 MPa to 1.5 GPa. These stresses have the effect of increasing the resonant frequencies of the transducers, making it a challenge to fabricate low frequency devices. Using the optimum dimensions by estimating the net residual stress in the fabricated diaphragms, transducers suitable for a frequency range of 17 kHz to 21 kHz were fabricated, capable of generating as much as 83 dB of sound pressure level at a distance of 5 cm in continuous operation.

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Fluid Density Sensing Using Piezoelectric Micromachined Ultrasound Transducers

Cited by 41 publications

References 25 publications

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

A PMUT based photoacoustic system as a microfluidic concentration detector

Data-Over-Sound With PMUTs

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