Fluid simulation of the effect of a dielectric window with high temperature on plasma parameters in inductively coupled plasma

Abstract

To maintain the high-density plasma source in inductively coupled plasma (ICP), very high radio frequency (RF) power is often delivered to the antenna, which can heat the dielectric windows near the antenna to high temperature. This high temperature could modulate the plasma characteristics in a large degree. We thus study the effect of dielectric window temperature on plasma parameters in the two different ICP structures based on COMSOL software. The distributions of various plasma species are examined at different dielectric window temperature. The concentration of neutral gas is found to be largely modulated at high dielectric window temperature, which further affects the electron collision probability with neutrals and the electron temperature. However, the electron density profiles are barely affected by the dielectric window temperature, which mainly concentrates at the center of the reactor due to the fixed power input and pressure.