The aims of this study were to modify dental device surface with fluorine and silver and to examine the effectiveness of this new surface modification method. Stainless steel plates were modified by plasma-based fluorine and silver ion implantation-deposition method. The surface characteristics and brushing abrasion resistance were evaluated by XPS, contact angle and brushing abrasion test. XPS spectra of modified specimens showed the peaks of fluoride and silver. These peaks were detected even after brushing abrasion test. Water contact angle significantly increased due to implantation-deposition of both fluorine and silver ions. Moreover, the contact angle of the modified specimen was significantly higher than that of fluorine only deposited specimen with the same number of brushing strokes. This study indicates that this new surface modification method of fluorine and silver ion implantationdeposition improved the brushing abrasion resistance and hydrophobic property making it a potential antimicrobial device.