Focused ion beam high T/sub c/ superconducting SQUIDs

High-transition-temperature superconducting quantum interference devices

“…Several groups have investigated rf SQUIDs (for example, Zani et al, 1991;Tinchev and Hinken, 1992;Tinchev, 1997) but since the most concentrated effort has been made at FZ, Jü lich, we shall largely focus on their work. We note that the main body of this work preceded the theory of Chesca (1998), and that a great deal of progress was made on largely empirical grounds.…”

Combined method of focused ion beam milling and ion implantation techniques for the fabrication of high temperature superconductor Josephson junctions

“…The local modification of the electrical properties of the HTS thin films using ion implantation is an alternative for junction fabrication. HTS Josephson junctions and superconducting quantum interference devices ͑SQUIDs͒ have been made of YBa 2 Cu 3 O 7 ͑YBCO͒ by focused ion beam ͑FIB͒ writing, 8 or by ion implantation using masking techniques 9,10 with limited success. Here we will report a novel approach of YBCO junction fabrication by local oxygen ion implantation through a narrow trench in an Au/photoresist mask, which was prepared by FIB milling and reactive ion etching.…”