Four-parameter model of thin surface layer contribution to reflectance-absorbance spectroscopy and ellipsometry
Alexander Michailov,
Alexey Povolotskiy,
Vladimir Kuzmin
Abstract:The contribution of the surface layer to the reflection coefficients is shown to be determined by four surface integral values, which can be interpreted as real and imaginary parts of two complex permittivity excesses. The reflectance-absorbance spectra are determined by the spectra of these parameters. The spectra of the surface excess integrals cannot be found with the angular measurements of reflection-absorption spectra, which are determined by only three angular dependent terms. To determine these four su… Show more
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