Fragmentation of Sputtered Cluster Ions of Transition Metals: Distributions of Lifetimes and Internal Energies

Atomistic Simulation of Physical Vapor Deposition of Optical Thin Films

“…The mean values of the number of the atoms are calculated for the niobium, tantalum, silver, and iron targets. In particular, the values of the average energy of the sputtered clusters are in the interval of 4-5 eV, which agrees with the experiments [66,67].…”

Statistical mechanism of the formation of the energy spectra of sputtered molecular clusters

“…1). Insignificant differences are observed only in the region of "negative" energies caused by the decay of clusters in the time range t > 10 -9 s after forma [5,9,10]. This identity of the energy spectra prob ably serves as direct experimental verification for the mechanism of cluster formation in the process of their recombination after sputtering from the surface.…”

“…The cluster ion acquires translational and internal energy (vibrational and rotational) sufficient Si O 3 7 − for inverse decay [4][5][6][7][8][9][10], as it occurs during the for mation of complex ions in bimolecular gas phase reac tions [11,12]. Thus, according to [4], the nature of Oand Si -ions and "magic" clusters is signifi cantly different: the first ones are primarily knocked out particles while the second ones are products of recombination reactions during processes of combina torial synthesis.…”

Decay rate constants of sputtered vanadium oxide clusters

“…A spread of excitation energies δN/δE B = f(E B ) [8,9] was observed in the sputtered clusters, which were found to decay along the route from target to detector [3][4][5][6][7]. Fragmentation study relies on the availability of zones in the experimental setup [3] in which direct registration of secondary ion decay is possible in various time spans.…”