2020
DOI: 10.1017/s1431927620014440
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From Photons to Electrons - A Correlative Workflow for Analysis and Preparation of Embedded Samples Using the LaserFIB

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“…However, the question remains how the SEM can gain access to the buried regions of interest. This is where the newly developed LaserFIB comes in [2]. The LaserFIB features a femtosecond (fs) laser that has been integrated with a FIB-SEM.…”
Section: Oberkochen Baden-wurttemberg Germanymentioning
confidence: 99%
“…However, the question remains how the SEM can gain access to the buried regions of interest. This is where the newly developed LaserFIB comes in [2]. The LaserFIB features a femtosecond (fs) laser that has been integrated with a FIB-SEM.…”
Section: Oberkochen Baden-wurttemberg Germanymentioning
confidence: 99%